The Nova i500 is the next generation Integrated Metrology platform targeted at advanced technology nodes of 22nm and below in both CMP and Etch.
With less than 1 second MAM time on measurement pad sizes as small as 25X25 microns, the throughput of the Nova i500 enables 100% pre & post polishing optical CD measurements. 
Having more than 4,500 hours Mean Time Between Failures (MTBF) the Nova i500 features the highest reliability of any Integrated Metrology system. Longer life lamps reduce consumables consumption and reduce the frequency of scheduled Preventive Maintenance (PM) thus further contributing to low CoO. A modern SEMI E95 compatible user interface coupled with a touch screen provides easy operation, independent of the host equipment’s user interface.

The Nova i500 went through rigorous testing and is now qualified on an industry leading CMP (chemical-mechanical polishing) platform.